Nanolithography is a branch of nanotechnology concerned with study and applications of nanofabrication of nanometer-scale structures. This technique can be used in nanofabrication of various semiconducting integrated circuits(IC'S), Nano electro mechanical systems(NEMS). Here modification in semiconductor chips at the nanoscale (i.e., the range of 10^-9m) is also possible. This method is contrasting to various applications existing nanolithography techniques like photolithographynanoimprint lithography, scanning probe lithography(spa), atomic force microscope.a

  • Track 1-1 Photolithography
  • Track 2-2 Electron Beam Microscope
  • Track 3-3 X-ray Lithography
  • Track 4-4 Extreme Ultraviolet Lithography (EUVL)
  • Track 5-5 Light Coupling Nano Lithography (LCM)
  • Track 6-6 Scanning Probe Microscope Lithography (SPM)
  • Track 7-7 Nanoimprint Lithography
  • Track 8-8 Dip-Pen Nanolithography.

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